Local oscillator distribution for a millimeter wave semiconductor device

ABSTRACT

A CMOS gain element is disclosed herein. Also disclosed herein are splitters, comprising the CMOS gain element, and local oscillator distribution circuitry comprising the splitters and the CMOS gain elements. Semiconductor devices comprising the local oscillator distribution circuitry may have smaller footprints and reduced power consumption relative to prior art devices.

BACKGROUND OF THE INVENTION Field of the Invention

Generally, the present disclosure relates to sophisticated semiconductordevices and, more specifically, to distribution of a mm-wave localoscillator signal, CMOS gain element, and semiconductor devicescomprising the same.

Description of the Related Art

In an effort to maintain Moore's Law as a self-fulfilling prophecy, thesemiconductor industry in recent years has sought to reduce the sizes ofsemiconductor devices. Also, in an effort to reduce operating expensesof semiconductor device, the semiconductor industry in recent years hassought to reduce the energy consumption of semiconductor devices. Thisis particularly a concern in semiconductor devices that operate in themillimeter wave (mm-wave) range.

Semiconductor devices that involve mm-wave applications include devicesthat operate based on the electromagnetic spectrum of radio bandfrequencies in the range of about 30 GigaHertz (GHz) to about 300 GHz.The mm-wave radio waves have a wavelength in the range of 1 millimeter(mm) to about 10 mm, which corresponds to a radio frequency of 30 GHz toabout 300 GHz. This band of frequencies is sometimes referred to asextremely high frequency (EHF) frequency band range. Examples ofapplications of mm-wave application include radar devices, high-speedcommunication devices (e.g., wireless gigabit (WiGig) devices,), etc.Radar devices have been implemented in various applications such asvehicle safety and automation applications.

Implementing mm-wave applications produces many challenges whendesigning circuits for these applications. A number of device types thatinvolve mm-wave applications require the splitting or dividing ofsignals. For example, in semiconductor devices, such as automotiveradars and wireless telephones meeting the 5G standard, which comprise aplurality of transmitter and/or receiver antennas, a timing signalprovided by an oscillator may be split to provide a timing signal toeach antenna.

Because splitting a signal reduces the output signal's power, splittingrequires power dividers to maintain the power of each split signal equalto the power of the input signal. Also, given that power is lost withdistance of signal transmission, repeaters may be needed to boost thesignal power.

Known power dividers include the Wilkinson and Gysel power dividers. TheWilkinson power divider, however, has a relatively large footprint and,because it is a passive divider, suffers from signal loss andaccordingly requires amplification. Use of an amplifier with theWilkinson power divider entails relatively large energy consumptioncharacteristics. Other power dividers, such as the Gysel power divider,and repeaters known in the art also have relatively large footprints andrelatively large energy consumption characteristics. Power dividers andrepeaters known in the art at mm-wave frequencies require impedancematching elements that include transformers and related circuits tooptimally function. The inclusion of transformers and related circuitsincreases silicon die area and therefore cost.

For example, a three-channel automotive radar receiver known in the artfrom a first manufacturer consumes about 790 mW and a two-channelautomotive radar known in the art from the first manufacturer consumesabout 858 mW, which are relatively large power consumptions.

Accordingly, it would be desirable to have a power divider and/or arepeater with a relatively small footprint and a relatively small energyconsumption.

SUMMARY OF THE INVENTION

The following presents a simplified summary of the invention in order toprovide a basic understanding of some aspects of the invention. Thissummary is not an exhaustive overview of the invention. It is notintended to identify key or critical elements of the invention or todelineate the scope of the invention. Its sole purpose is to presentsome concepts in a simplified form as a prelude to the more detaileddescription that is discussed later.

Generally, the present disclosure is directed to CMOS gain elements andapparatus comprising such gain elements. CMOS gain elements may allowpower dividers and repeaters to have relatively small footprints andrelatively small energy consumptions.

In one embodiment, the present disclosure relates to a gain element,comprising: a first circuit comprising: a capacitor; a resistor, a firsttransistor, and a second transistor in parallel; wherein one of thefirst transistor and the second transistor is an NMOS transistor, andthe other of the first transistor and the second transistor is a PMOStransistor; and a second circuit comprising: a capacitor; a resistor, afirst transistor, and a second transistor in parallel; wherein one ofthe first transistor and the second transistor is an NMOS transistor,and the other of the first transistor and the second transistor is aPMOS transistor.

In one embodiment, the present disclosure relates to a splitter,comprising: a first gain element in series with a plurality of secondgain elements, wherein the plurality of second gain elements are inparallel; wherein the first gain element and each second gain elementeach comprise: a first circuit comprising: a capacitor; a resistor, afirst transistor, and a second transistor in parallel; wherein one ofthe first transistor and the second transistor is an NMOS transistor,and the other of the first transistor and the second transistor is aPMOS transistor; and a second circuit comprising: a capacitor; aresistor, a first transistor, and a second transistor in parallel;wherein one of the first transistor and the second transistor is an NMOStransistor, and the other of the first transistor and the secondtransistor is a PMOS transistor.

In one embodiment, the present disclosure relates to a semiconductordevice, comprising: an oscillator configured to provide a first signalhaving a wavelength λ; a first splitter configured to receive the firstsignal and provide a second signal and a third signal, wherein thesecond signal and the third signal each have the wavelength λ; a firstline configured to carry the second signal provided by the firstsplitter; a second line configured to carry the third signal provided bythe first splitter; a transmitter splitter configured to receive thesecond signal via the first line and provide a plurality of transmittersignals, wherein each transmitter signal has the wavelength λ; and areceiver splitter configured to receive the second signal via the secondline and provide a plurality of receiver signals, wherein each receiversignal has the wavelength λ; wherein the first line has a length fromλ/4 to λ/32 and the second line has a length from λ/4 to λ/32. The firstsplitter, the transmitter splitter, and the receiver splitter may eachbe a splitter referred to above. The semiconductor device may alsocomprise one or more repeaters, wherein each repeater may be a gainelement referred to above.

BRIEF DESCRIPTION OF THE DRAWINGS

The disclosure may be understood by reference to the followingdescription taken in conjunction with the accompanying drawings, inwhich like reference numerals identify like elements, and in which:

FIG. 1 illustrates a stylized block diagram representation of a radarsystem, in accordance with embodiments herein;

FIG. 2 illustrates a stylized block diagram description of thecontroller unit 140, in accordance with embodiments herein,;

FIG. 3 illustrates a stylized block diagram depiction of the radar frontend unit of FIG. 1, in accordance with embodiments herein, isillustrated;

FIG. 4 illustrates a stylized block diagram of the transmitter unit ofFIG. 3, in accordance with embodiments herein;

FIG. 5 illustrates a stylized block diagram of the receiver unit of FIG.3, in accordance with embodiments herein;

FIG. 6 illustrates a stylized block diagram depiction of the signalprocessing unit of FIG. 1, in accordance with embodiments herein;

FIG. 7 illustrates a stylized block diagram depiction of the antennaunit of FIG. 1, in accordance with embodiments herein;

FIG. 8 illustrates a stylized block diagram depiction of an exemplaryradar application of the system of FIG. 1, in accordance withembodiments herein;

FIG. 9 illustrates a stylized depiction of a local oscillator unit, inaccordance with embodiments herein;

FIG. 10 illustrates a semiconductor device, in accordance withembodiments herein;

FIG. 11 illustrates a gain unit, in accordance with embodiments herein;

FIG. 12 illustrates a splitter, in accordance with embodiments herein;and

FIG. 13 illustrates a stylized depiction of a system for fabricating asemiconductor device, in accordance with embodiments herein.

While the subject matter disclosed herein is susceptible to variousmodifications and alternative forms, specific embodiments thereof havebeen shown by way of example in the drawings and are herein described indetail. It should be understood, however, that the description herein ofspecific embodiments is not intended to limit the invention to theparticular forms disclosed, but on the contrary, the intention is tocover all modifications, equivalents, and alternatives falling withinthe spirit and scope of the invention as defined by the appended claims.Moreover, the stylized depictions illustrated in the drawings are notdrawn to any absolute scale.

DETAILED DESCRIPTION

Various illustrative embodiments of the invention are described below.In the interest of clarity, not all features of an actual implementationare described in this specification. It will of course be appreciatedthat in the development of any such actual embodiment, numerousimplementation-specific decisions must be made to achieve thedevelopers' specific goals, such as compliance with system-related andbusiness-related constraints, which will vary from one implementation toanother. Moreover, it will be appreciated that such a development effortmight be complex and time-consuming, but would nevertheless be a routineundertaking for those of ordinary skill in the art having the benefit ofthis disclosure.

The present subject matter will now be described with reference to theattached figures. Various structures, systems, and devices areschematically depicted in the drawings for purposes of explanation onlyand so as to not obscure the present disclosure with details that arewell known to those skilled in the art. Nevertheless, the attacheddrawings are included to describe and explain illustrative examples ofthe present disclosure. The words and phrases used herein should beunderstood and interpreted to have a meaning consistent with theunderstanding of those words and phrases by those skilled in therelevant art. No special definition of a term or phrase, i.e., adefinition that is different from the ordinary and customary meaning asunderstood by those skilled in the art, is intended to be implied byconsistent usage of the term or phrase herein. To the extent that a termor phrase is intended to have a special meaning, i.e., a meaning otherthan that understood by skilled artisans, such a special definition willbe expressly set forth in the specification in a definitional mannerthat directly and unequivocally provides the special definition for theterm or phrase.

Embodiments herein provide for distribution of local oscillator signalsto transmitters and receivers of a mm-wave system, e.g., a radar system,with low power consumption and small footprint, and without the use ofWilkinson, Gysel, or other power dividers.

For ease of illustration, embodiments herein is depicted within thecontext of a radar device, however, those skilled in the art wouldreadily appreciate that the concepts disclosed herein may be implementedin other types of devices, such as high-speed communication devices,network devices, etc. Turning now to FIG. 1, a stylized block diagramrepresentation of a radar system, in accordance with embodiments herein,is illustrated.

A system 100 may comprise a millimeter wave (mm-wave) device 110, adatabase 170, and a motor controller 180. The mm-wave device 110 may bea radar device, a wireless communication device, a data network device,a video device, or the like. For illustrative purposes and for the sakeof clarity and ease of description, the mm-wave device 110 is describedin the context of a radar application; as such, the mm-wave device 110may be often referred to below as a radar device 110. However, thoseskilled in the art having benefit of the present disclosure wouldappreciate that the concepts described herein may be applied to avariety of type of mm-wave applications, including vehicle applicationsusing radar signals, wireless network applications, data networkapplications, video and audio applications, etc.

The radar device 110 is capable of transmitting a radar signal,receiving a reflected signal resultant from the reflection of the radarsignal, processing the reflected signal, and providing status dataand/or reaction data for performing one or more actions based on thereflected signal. In one embodiment, the status data may include statusof the target from which the reflection was received. Further, a motorcontroller 180 may control operations of one or more motors. Examples ofmotors may include devices that performing braking functions, steeringfunctions, gear-shifting functions, accelerating functions, warningfunctions, and/or other actions relating to the operations of a roadvehicle, an aircraft, and/or a watercraft. The motor controller 180 mayuse the reaction data and/or the status data to perform these controlfunctions. The motor controller 180 may comprise one or more controllersthat are capable of controlling a plurality of devices that perform thevarious operations of a road vehicle, an aircraft, and/or a watercraft.

The radar device 110 may comprise a radar front end unit 120, an antennaunit 130, a controller unit 140, and a signal processing unit 150. Theradar front end unit 120 may comprise a plurality of components,circuit, and/or modules, and is capable of sending, receiving,processing, and reacting to radar signals. In one embodiment, the radardevice 110 may be encompassed into a single integrated circuit (IC)chip. In some embodiments, the radar device 110 may be formed on aplurality of integrated circuits that are positioned on a single ICchip. In other embodiments, radar device 110 may be formed on singleintegrated circuit, which is shrouded into an IC chip.

The radar front end unit 120 is capable of providing a radar signal. Inone embodiment, the frequency range of the radar signals processed bythe radar device 110 may be in the range of about 10 GHz to about 90GHz. The radar front end unit 120 is capable of generating a radarsignal at a predetermined frequency range and directing the radar signalat a predetermined target area. The radar front end unit 120 is alsocapable of receiving a reflected signal based on the reflection of radarsignal, and processing the reflected signal to determine a plurality ofcharacteristics, such as the direction of a target, the speed of atarget, the relative distance of a target, and/or the like. A moredetailed description of the radar front end unit 120 is provided in FIG.3 and accompanying description below.

In an alternative embodiment, the 120 may be a network communicationsfront end unit, instead of a radar front end unit. In this embodiment,instead of receiving, transmitting, and/or processing radar signals, thedevice 110 may process network communications for various types ofcommunication applications, such as packet data network communications,wireless (e.g., cellular communications, IEEE 802.11ad WiGig Technology,etc.), data communications, etc. The concepts disclosed herein in thecontext of radar applications may also be utilized for other types ofapplications, such as network communications, wireless communications,high-definition video applications, etc.

Continuing referring to FIG. 1, the antenna unit 130 may also comprise atransmission antenna and/or a receiver antenna. Further, each of thetransmission and receiver antennas may comprise sub-portions to form anarray of antennas. The transmission antennas are used for transmittingthe radar signal, while the receiver antennas are used for receivingreflected signals resulting from reflections of the radar signal. A moredetailed description of the antenna unit 130 is provided in FIG. 7, andaccompanying description below.

Continuing referring to FIG. 1, the radar device 110 may also comprise asignal processing unit 150. The signal processing unit is capable ofperforming various analog and/or digital processing of the signals thatare transmitted and/or received by the radar device 110. For example,the radar signal transmitted by the radar device may be amplified priorto its transmission. Further, the reflected signal received by the radardevice 110 may be sent through one or more analog filter stages. Thereflected signals may then be converted/digitized into a digital signalby one or more analog-to-digital converters (A/D converters) in thesignal processing unit 150. Digital signal processing (DSP) may beperformed on the digitized signal. A more detailed description of thesignal processing unit 150 is provided in FIG. 6 and accompanyingdescription below.

Continuing referring to FIG. 1, the radar device 100 may also comprise acontroller unit 140. The controller unit 140 may perform various controloperations of the radar device 110. These functions include generating aradar signal, transmitting the radar signal, receiving a reflectedsignal, processing the reflected signal, and perform one or moredeterminations of the location, direction, speed, or other parameters ofa target based on the reflected signal. The controller unit 140 iscapable of generating the status data and the reaction data describedabove.

Turning now to FIG. 2, a stylized block diagram description of thecontroller unit 140, in accordance with embodiments herein, is provided.The controller unit 140 may comprise a processor unit 230 capable ofcontrolling various function of the radar device 110. The processor unit230 may comprise a microprocessor, a microcontroller, a fieldprogrammable gate array (FPGA), an application-specific integratedcircuit (ASIC), and/or the like.

The controller unit 140 may also comprise a logic unit 220. The logicunit 220 may comprise a circuit that is capable of performing variouslogic operations, receiving data, and/or performing interface functionswith respect to input data (data_in) and output data (data_out). Thesignal, data_in, may represent data derived from processing andanalyzing the reflected signal. The signal, data_out, may represent datagenerated for performing one or more tasks as a result of the radarsignal transmission and the reflected signal. For example, the data_outsignal may be used to perform an action (e.g., braking, steering,accelerating, providing warnings, etc.) based on the radar signaltransmission and reflected signal reception.

The controller unit 140 may also comprise a memory unit 210. The memoryunit 210 may comprise a non-volatile memory 214 and a RAM 212. Thenon-volatile memory 214 may comprise FLASH memory and/or programmableread only (PROM) devices. The memory unit 210 is capable of storingoperation parameters, program files, etc., for controlling variousoperations of the radar device 110. Further, the memory unit 210 maystore the status data and the reaction data described above. The memoryunit 210 may also store data that may be used to program any FPGAdevices in the radar device 110. As such, the memory unit 210 may besubdivided into a program data memory, a status data memory, and areaction data memory. This subdivision may be performed logically,physically, or based on both, logical and physical subdivisions.

Turning now to FIG. 3, a stylized block diagram depiction of the radarfront end unit 120, in accordance with embodiments herein, isillustrated. The radar front end unit 120 may comprise a signalgeneration unit 310, a transmitter unit 320, and a receiver unit 330.The signal generation unit 310 is capable of generating a radar signalat a predetermined frequency. For example, a signal in the range ofabout 70 GHz to about 85 GHz may be generated. The signal generationunit 310 is capable of providing a radar signal for transmission. Moredetailed description of the signal generation unit 310 is providedbelow.

Continuing referring to FIG. 3, a signal for processing and transmissionis provided by signal generation unit 310 to the transmitter unit 320.The transmitter unit 320 may comprise a plurality of filters, signalconditioning circuits, buffer, amplifiers, etc. for processing thesignal from the signal generation unit 310. The transmission unit 320provides a radar signal to be transmitted to the antenna unit 130.

FIG. 4 illustrates a stylized block diagram of the transmitter unit 320,in accordance with embodiments herein. Referring simultaneously to FIGS.3 and 4, the transmitter unit 320 may comprise a plurality of similartransmitters, i.e., a 1^(st) transmitter 410 a, a 2^(nd) transmitter 410b, through an N^(th) transmitter 410 n (collectively “410”). In oneembodiment, the 1^(st) through N^(th) transmitters 410 may each processa single signal from the signal generation unit 310 and provide anoutput transmission signal to one or more antennas. In anotherembodiment, the signal generation unit 310 may provide a plurality ofsignals to the through N^(th) transmitters 410. For example, the signalgeneration unit 310 may provide a signal transmit signal for eachtransmitter 410, or alternatively, a 1^(st) transmit signal for a firstset of transmitters 410 and a 2^(nd) transmit signal for a second set oftransmitters 410.

Continuing referring to FIG. 3, a received signal (i.e., a reflectedsignal resulting from a reflection of the radar signal directed towardsa target area) is provided to the receiver unit 330. The receiver unit330 is capable of receiving the processed received signal from thesignal processing unit 130. The receiver unit 330 is capable ofperforming analog-to-digital (A/D) conversion, signal buffering, DSP,etc. In some embodiments, the signal processing unit 130 may perform A/Dconversions and DSP; however, in other embodiments, these tasks may beperformed by the receiver unit 330. The receiver unit 330 is capable ofdirecting the output signal, data_out, to the controller unit 140.

FIG. 5 illustrates a stylized block diagram of the receiver unit 320, inaccordance with embodiments herein. Referring simultaneously to FIGS. 3and 5, the receiver unit 320 may comprise a plurality of similarreceivers, i.e., a 1^(st) receiver 510 a, a 2^(nd) receiver 510 b,through an N^(th) receiver 510 n (collectively “510”). In oneembodiment, the 1^(st) through N^(th) receivers 510 may each process asingle signal from the signal generation unit 310 and provide the signalto the controller unit 140. In another embodiment, the may provide aplurality of signals to the through N^(th) receiver 510. For example,the antenna unit 130 may provide a signal to each receiver 510, oralternatively, a 1^(st) receiver signal for a first set of receivers510, and a 2^(nd) receiver signal for a second set of receivers 510.

Turning now to FIG. 6, a stylized block diagram depiction of the signalprocessing unit 150, in accordance with embodiments herein isillustrated. The signal processing unit 150 may comprise an analogfilter unit 610, an A/D converter 620, a DSP unit 630, and a memory 640.The analog filter unit 610 is capable of performing filtering as well asamplification of the analog mm-wave signal received by the signalprocessing unit 150. Noise filtering may be performed by the analogfilter unit 610 prior to performing amplification of the analog mm-wavesignal.

The A/D converter 620 is capable of converting the filtered and/oramplified analog signal into a digital signal. The A/D converter 620 maybe capable of performing conversions of predetermined or varyingaccuracy. For example, the A/D converter 620 may have an accuracy of12-bit, 24-bit, 36-bit, 48-bit, 64-bit, 96-bit, 128-bit, 256-bit,512-bit, 1024-bit, or greater accuracy. The converted digital mm-wavesignal is provided to the DSP unit 630.

The DSP unit 630 is capable of performing a variety of DSP operations onthe digital mm-wave signal. For example, digital filtering of thedigital mm-wave may be performed by the DSP unit 630. As an example,signal components outside of a predetermined frequency range, e.g., 70GHz to about 85 GHz may be filtered to be of lower amplitude. In otherinstances, mathematical functions, such as Fast Fourier Transform (FFT),may be performed on the mm-wave signal. The processed digital outputfrom the DSP unit 630 may be sent to the controller unit 140 foranalysis. In other instances, the digital output may be buffered orstored into a memory 640. In some cases, the memory 610 may be afirst-in-first-out (FIFO) memory. In other cases, the processed digitaloutput from the DSP unit 630 may be stored in the memory unit 210 of thecontroller unit 140.

Turning now to FIG. 7, a stylized block diagram depiction of the antennaunit of FIG. 1, in accordance with embodiments herein, is illustrated.Millimeter-wave signals to be sent out (e.g., radar signals, networkdata signals, wireless communication signals, etc.) may be provided bythe transmitter unit 320 (FIG. 3) to the transmit antenna 710. In oneembodiment, the transmit antenna 710 may comprise a plurality oftransmit antenna portions 715. The transmit antenna portions 715 arearranged in a predetermined pattern, e.g., an array matrix, asexemplified in FIG. 7.

Millimeter-wave signals that are to be received (e.g., radar signals,network data signals, wireless communication signals, etc.) may becaptured by the receive antenna 720. The receive antenna 720 providesthe received mm-wave signals to the receiver unit 330 (FIG. 3). In oneembodiment, the receive antenna 720 may comprise a plurality of receiveantenna portions 725. The receive antenna portions 725 are also arrangedin a predetermined pattern, e.g., an array matrix exemplified in FIG. 7.

Turning now to FIG. 8, a stylized block diagram depiction of anexemplary radar application of the system 100, in accordance withembodiments herein is illustrated. FIG. 8 shows an exemplaryimplementation of the signal generation unit 310 (FIG. 3) and exemplaryportions of the transmitter unit 320 and the receiver unit 330.

The signal generation unit 310 generates a signal (e.g., a radar signal)that is to be transmitted and directed to a target region, e.g., towardthe area in front of a vehicle. A frequency modulated continuous wave(FMCW) generator 810 provides an mm-wave signal in the range of about 20GHz. The FMCW generator 810 may be arranged to provide a low speed ramp(LSR) signal or a high speed ramp (HSR) signal. In alternativeembodiment, the FMCW generator 810 may be replaced by a pulse traingenerator for application of a Pulse Doppler radar system.

Further, a reference signal is provided by a reference signal generator812. The mm-wave signal from the FMCW generator 810 and the referencesignal are both sent to a digital phase lock loop (DPLL) 820. The DPLL820 locks the phase of the mm-wave signal from the FMCW generator 810with the phase of the reference signal. The output of the DPLL 820 issent to a digitally controlled oscillator (DCO) 825. The output of theDCO is fed back to the DPLL. Thus, the DCO 825 is capable of providing astable DCO signal. The DCO signal is, in one embodiment, about 20 GHz. Aplurality of low dropout (LDO) regulators 827, which may comprise areference voltage, an error amplifier, a feedback voltage divider, and aplurality of pass elements, e.g., transistors. The LDO regulators 827are arranged to provide a regulated voltage supply to the variousportions of the circuit of FIG. 8. Generally, this regulated voltagesupply is lower than the supply voltage.

The signal generation unit 310 may also comprise one or more localoscillator (LO) units 880. The local oscillator unit 880 may be arrangedto provide an oscillator chain for distributing mm-wave signals to aplurality of transmitters and receivers. In some embodiments, thedigitally controlled, phase-locked output mm-wave signal (i.e., outputof the DCO 825) based on the FMCW signal and the reference signals maybe provided by the local oscillator unit 880. The local oscillator unit880 may provide mm-wave signals to the transmitter unit 320 fortransmitting mm-wave signals, and/or to the receiver unit 330 to performmixer functions. The local oscillator unit 880 may comprise a phase lockloop and a local oscillator distribution circuitry. A more detaileddescription of the local oscillator distribution circuitry is providedin FIGS. 9-11 and accompanying description below.

In some embodiments, it is desirable to transmit an 80 GHz signal, forexample in a vehicle radar application. The DCO 825 provides a 20 GHzsignal, therefore, two frequency doublers may be used to multiply the 20GHz signal to provide a 40 GHz, and then multiply the 40 GHz signal toprovide an 80 GHz signal to transmit. Accordingly, a 1^(st) frequencymultiplier 830 is used to double the 20 GHz signal to produce a 40 GHzsignal. A 2^(nd) frequency multiplier 832 is used to double the 40 GHzsignal to produce an 80GHz signal. The output of the 2^(nd) frequencymultiplier 832 is provided to a power amplifier 840. The output of thepower amplifier 840 may be provided to the antenna for transmission. Apower detector 842 may detect the power of the output of the poweramplifier 840, and may prompt feedback adjustments in order to maintaina predetermined power level of the transmit signal. In some embodiments,the transmitted signal may be 77 GHz signal, and the frequency of theDCO 825 is adjusted accordingly to provide the 77 GHz signal at theoutput of the 2^(nd) frequency multiplier 832 and/or the 3^(rd)frequency multiplier 835.

A received signal may be processed by the circuit shown in FIG. 8. Thereceived signal, e.g., from the signal processing unit 150, is providedto a balun circuit 850. The balun may comprise a transformer, andprovides a differential output to a pre-amplifier 852. After performinga pre-amplification of the received signal, the output from thepre-amplifier 852 is provided to the mixer 860.

The mixer 860 is capable of combining the received signal from thepre-amplifier 852, with an output signal from a 3^(rd) frequencymultiplier 835. The output of the 3^(rd) frequency multiplier 835 is thedoubled version of the 40 GHz signal from the 1^(st) frequencymultiplier. That is, the output of the 3^(rd) frequency multiplier 835is an 80 GHz reference signal. The mixer 860 receives the reference 80GHz signal and in one embodiment, multiplies it to the received signal,which is a reflected or echo signal resulting from the reflection fromthe transmitted signal. The output of the mixer may be used to determinevarious characteristics regarding an object(s) from which thetransmitted signal was reflected, including direction, location,trajectory, and/or speed of the object.

The output of the mixer 860 is provided to an analog baseband (ABB) unit865. The mixer 860 converts the incoming mm-wave signal using a localoscillator (which may be provided by local oscillator unit 880) to lowerthe frequency of the signal. The analog baseband unit 865 can include atransimpedance amplifier (TIA), which may include one or more filtersand/or other low frequency gain stages. The output of the ABB unit 865is provided to an automatic gain control (AGC) and filter circuits 868.A saturation detection circuit 872 may detect any saturation of thesignal processed by the AGC/filter circuits 868 and perform responsiveadjustment. The output of the AGC/filter circuits 868 is provided to anA/D converter 870. The output of the A/D converter 870 may be providedto the controller unit 140 for further processing and responsiveactions, such as digital signal processing (DSP).

FIG. 9 illustrates a stylized depiction of a local oscillator unit, inaccordance with embodiments herein. The LO unit 880 depicted in FIG. 9comprises a LO distribution chain utilizing splitters and repeaters,which can be scaled to accommodate various technology nodes. Therepeaters and splitters of the LO unit 880 provide for distributingrelatively smaller gain stages, thereby providing for avoiding a singlelarge gain stage. This may result in improved stability at mm-wavefrequencies.

The LO unit 880 may receive an mm-wave signal from the DCO 825. The DCOsignal is sent to an analog-digital phase lock loop (AD-PLL) 1005. Uponperforming a phase locking function, the phase-locked signal is providedto a 1^(st) splitter 1020. The 1^(st) splitter 1020 may provide threeoutputs: a feedback phase lock loop signal to a feedback phase lock loop1025; a transmission signal to a transmission (TX) repeater-splitter1050; and a receiver signal to a receiver (RX) repeater-splitter 1060.The repeater-splitters 1050, 1060 are comprised of gain elements,wherein the splitting of the signals may be performed without usingdividers, but using signal lines that connect between elements of the LOunit 880, wherein the lengths of the signal lines are a predeterminedfraction of the wavelength, λ of the mm-wave signal (e.g., /4 to λ/32),and in one embodiment, λ/10).

The output from the TX repeater-splitter 1050 is provided to a TXrepeater 1070 after a line length that is the predetermined fraction ofthe wavelength (e.g., λ/10). Likewise, the output from the RXrepeater-splitter 1060 is provided to an RX repeater 1080 after a linelength that is the predetermined fraction of the wavelength (e.g.,λ/10). The output of the TX repeater 1070, i.e., a TX output signal, isprovided to one or more transmitter frequency multipliers 1090associated with the transmitter unit 320 via a LO-TX line 910. Theoutput of the RX repeater 1080 is provided to one or more receiverfrequency multipliers 1090 associated with the receiver unit 330, via aLO-RX line 920. The TX-LO line 910 and the RX-LO line 920 are of alength that is the predetermined fraction of the wavelength (e.g.,λ/10).

The transmitter unit 320 may comprise other circuitry that provides thesignal to be transmitted to the TX antenna 710. The receiver unit 330may also comprise of various circuitry, such as a mixer (as exemplifiedabove with regard to FIG. 8), to which the receiver frequencymultipliers 1095 provide an mm-wave signal. The output of the receiverfrequency multiplier 330 may be provided to a mixer, along with the RXinput signal from the RX antenna 720 to perform a mixing function.

The various repeater and splitter stages described in FIG. 9 may becomprised of gain elements comprising CMOS circuitry. The signal fromthe DCO 825 may be of a frequency such that the length of the LO linesbetween the elements of the LO unit 880 may be segmented to a fractionof the wavelength, λ (e.g., λ/4 to λ/32). In some embodiments, low andvariable gain CMOS elements may be used to form the repeater andsplitter circuitry of the LO unit 880. The frequency multiplicationdescribed above may be an integer, e.g., 2, 3, 4, 5, . . . . In oneembodiment, the integer 3 may be avoided as to reduce the thirdharmonic, which may be stronger than the second harmonic of the mm-wavesignal.

Further, the implementation of the LO unit 880 may also provide forreducted area usage, and improved isolation between the transmissionlines and the receiver lines. The output from the TX frequencymultiplier 1090 may be provided to power amplifiers for transmission viathe TX antenna 710. The output from the receiver frequency multipliers1095 may be provided to a mixer along with the received RX input signal.FIG. 10 illustrates a stylized depiction of a semiconductor devicehaving a local oscillator distribution circuitry 1000 associated withthe LO unit 880, in accordance with embodiments herein. The localoscillator distribution circuitry 1000 comprises an oscillator 1010. Theoscillator 1010 provides a first signal having a wavelength λ. Theoscillator 1010 may represent various elements, such as an FMCWgenerator a reference signal generator, a DPLL, a DCO, etc. As will beknown to the person of ordinary skill in the art, the wavelength λ isrelated to the frequency f essentially according to the formula f=c/λ,where c is the speed of light in the medium through which the signalpropagates. The speed of light will depend on the permittivity andpermeability of the medium. For example, in a silicon die, if f=20 GHz,then λ=6 mm. As depicted, the oscillator 1010 provides a differential(or double ended) output. In other embodiments (not shown), theoscillator 1010 may provide a single ended (non-differential) output.

The local oscillator distribution circuitry 1000 also comprises thefirst splitter 1020 arranged to receive the first signal from theoscillator 1010 and provide a second signal and a third signal. Thefirst splitter 1020 does not change the frequency or wavelength of thefirst signal. Accordingly, the second signal and the third signal eachhave the wavelength λ. As depicted, the first splitter 1020 alsoprovides a signal to a feedback PLL 1025, to assist in normal operationof the local oscillator distribution circuitry 1000, as will be apparentto the person of ordinary skill in the art having the benefit of thepresent disclosure. The first splitter 1020 comprises a plurality ofgain elements 1022. The structure of the gain element 1022 will bedescribed in FIG. 10 and accompanying description below.

The local oscillator distribution circuitry 1000 also comprises a firstline 1030 arranged to carry the second signal provided by the firstsplitter, and a second line 1040 arranged to carry the third signalprovided by the first splitter. Because the second signal and thirdsignal are double ended, the first line and the second line eachcomprise two conductive elements, as depicted in FIG. 10.

Desirably, the first line 1030 and the second line 1040 have lengthsselected according to the wavelength(s) of the second signal and thethird signal. Appropriate selection of line lengths reduces thelikelihood and/or extent of matching. In one embodiment, the first line1030 has a length from λ/4 to λ/32. In one embodiment, the second line1040 has a length from λ/4 to λ/32.

In a further embodiment, the first line 1030 has a length from λ/8 toλ/16. In a further embodiment, the second line 1040 has a length fromλ/8 to λ/16. Though not to be bound by theory, at shorter lengths (i.e.,the greater the denominator x in λ/x), more repeaters will generally berequired and the power consumption will generally be greater. At greaterlengths (i.e., the lesser the denominator x in λ/x), fewer repeaterswill generally be required, but reflections are more likely and mismatchlosses will generally be higher.

In a particular embodiment, the first line 1030 has a length of λ/10 andthe second line 1040 has a length of λ/10.

The local oscillator distribution circuitry 1000 further comprises atransmitter splitter 1050 arranged to receive the second signal via thefirst line 1030, and provide a plurality of transmitter signals.Similarly to the first splitter 1020, the transmitter splitter 1050 doesnot change the frequency or wavelength of the second signal.Accordingly, each transmitter signal has the wavelength λ.

The local oscillator distribution circuitry 1000 also comprises areceiver splitter 1060 arranged to receive the second signal via thesecond line 1040, and provide a plurality of receiver signals. Similarlyto the first splitter 1020 and the transmitter splitter 1050, thereceiver splitter 1060 does not change the frequency or wavelength ofthe second signal. Accordingly, each receiver signal has the wavelengthλ.

The oscillator 1010, the first splitter 1020, the first line 1030, thesecond line 1040, the transmitter splitter 1050, and the receiversplitter 1060 may be considered to be components of the AD-PLL 1005.

In one embodiment, the local oscillator distribution circuitry 1000 mayfurther comprise a plurality of third lines 1055, wherein each thirdline 1055 is arranged to carry one transmitter signal provided by thetransmitter splitter 1050. As depicted in FIG. 10, the local oscillatordistribution circuitry 1000 comprises three third lines, 1055 a, 1055 b,and 1055 c. In other embodiments (not shown), the local oscillatordistribution circuitry 1000 may comprise two, four, five, or anotherplural number of third lines 1055.

In one embodiment, the local oscillator distribution circuitry 1000 mayfurther comprise a plurality of fourth lines 1065, wherein each fourthline 1065 is arranged to carry one receiver signal provided by thereceiver splitter 1060. As depicted in FIG. 10, the local oscillatordistribution circuitry 1000 comprises four third lines, 1065 a, 1065 b,1065 c, and 1065 d. In other embodiments (not shown), the localoscillator distribution circuitry 1000 may comprise two, three, five, oranother plural number of fourth lines 1065.

Desirably, each third line 1055 and each fourth line 1065 has a lengthselected according to the wavelength(s) of the transmitter signals andthe receiver signals, respectively. In one embodiment, wherein eachthird line 1055 has a length from λ/4 to λ/32. In one embodiment, eachfourth line 1065 has a length from λ/4 to λ/32.

In a further embodiment, each third line 1055 has a length from λ/8 toλ/16. In a further embodiment, each fourth line 1065 has a length fromλ/8 to λ/16. In one particular embodiment, each third line 1055 has alength of λ/10 and each fourth line 1065 has a length of λ/10.

In one embodiment, the local oscillator distribution circuitry 1000 mayadditionally comprise a plurality of transmitter repeaters 1070, whereineach transmitter repeater 1070 is arranged to receive one transmittersignal via one third line 1055 and repeat the transmitter signal. Forexample, as depicted in FIG. 10, the local oscillator distributioncircuitry 1000 comprises three transmitter repeaters 1070 a, 1070 b, and1070 c, one for each of the third lines 1055 a, 1055 b, and 1055 c.

In one embodiment, the local oscillator distribution circuitry 1000 mayalso comprise a plurality of receiver repeaters 1080, wherein eachreceiver repeater 1080 is arranged to receive one receiver signal viaone fourth line 1065 and repeat the receiver signal. For example, asdepicted in FIG. 10, the local oscillator distribution circuitry 1000comprises four receiver repeaters 1080 a, 1080 b, 1080 c, and 1080 d,one for each of the fourth lines 1065 a, 1065 b, 1065 c, and 1065 d.

The positions of transmitter repeaters 1070 and receiver repeaters 1080in a semiconductor device having local oscillator distribution circuitry1000 may be selected to minimize reflections and minimize signal losses.

As depicted in FIG. 10, in one embodiment, the local oscillatordistribution circuitry 1000 may yet further comprise a plurality offifth lines 1075, wherein each fifth line 1075 is arranged to carry onerepeated transmitter signal provided by one transmitter repeater 1070.For example, the local oscillator distribution circuitry 1000 depictedin FIG. 10 comprises three fifth lines, 1075 a, 1075 b, and 1075 c, ofwhich fifth line 1075 a carries the repeated transmitter signal providedby transmitter repeater 1070 a, etc.

In one embodiment, the local oscillator distribution circuitry 1000 mayadditionally comprise a plurality of sixth lines 1085, wherein eachsixth line 1085 is arranged to carry one repeated receiver signalprovided by one receiver repeater 1080. For example, the localoscillator distribution circuitry 1000 depicted in FIG. 10 comprisesfour sixth lines, 1085 a, 1085 b, 1085 c, and 1085 d, of which sixthline 1085 a carries the repeated receiver signal provided by receiverrepeater 1080 a, etc.

Desirably, each fifth line 1075 and each sixth line 1085 has a lengthselected according to the wavelength(s) of the repeated transmittersignals and the repeated receiver signals, respectively. In oneembodiment, each fifth line 1075 has a length from λ/4 to λ/32. In oneembodiment, each sixth line 1085 has a length from λ/4 to λ/32.

In a further embodiment, each fifth line 1075 has a length from λ/8 toλ/16. In a further embodiment, each sixth line 1085 has a length fromλ/8 to λ/16. In one particular embodiment, each fifth line 1075 has alength of λ/10 and each sixth line 1085 has a length of λ/10.

The various lengths at various stages may vary. For example, in oneembodiment, the first line 1030 and the second line 1040 may have afirst particular length; each third line 1055 and each fourth line 1065may have a second particular length different from the first particularlength; and each fifth line 1075 and each sixth line 1085 may have athird particular length different from the first particular length, thesecond particular length, or both.

The lengths of one or more of the first line 1030, the second line 1040,the third lines 1055, the fourth lines 1065, the fifth lines 1075, andthe sixth lines 1085 may be selected to minimize reflections andminimize signal losses.

Although FIG. 10 shows only one set of transmitter repeaters 1070 andone set of receiver repeaters 1080, the local oscillator distributioncircuitry 1000 may comprise additional sets of repeaters and additionalsets of lines.

In one embodiment, the local oscillator distribution circuitry 1000 mayfurther comprise the transmitter frequency multiplier 1090 arranged tomultiply a frequency of each repeated transmitter signal. For example,the transmitter frequency multiplier 1090 may be arranged to multiplythe frequency of each repeated transmitter signal by 2, 3, 4, or 5. In aparticular embodiment, the transmitter frequency multiplier 1090 isarranged to multiply the frequency of each repeated transmitter signalby 4. A multiplier of 4 may be desirable because such a multiplier maybe provided by a digitally controlled oscillator 825 and an ADPLL 1005,which can be implemented in CMOS technologies, may function as a PLL1025. In some embodiments, the transmitter frequency multiplier 1090 maycomprise a plurality of individual frequency multipliers that arearranged in series. The output of the transmitter frequency multiplier1090 may be provided to the transmission antenna 710. Techniques andcircuits that multiply a frequency are known to the person of ordinaryskill in the art or may be described in other patents or publishedpatent applications assigned to GLOBALFOUNDRIES Inc., and need not bedescribed further.

In one embodiment, the local oscillator distribution circuitry 1000 mayadditionally comprise a receiver frequency multiplier 1095 arranged tomultiply a frequency of each repeated receiver signal. For example, thereceiver frequency multiplier 1095 may be arranged to multiply thefrequency of each repeated receiver signal by 2, 3, 4, or 5. In oneparticular embodiment, the receiver frequency multiplier 1095 isarranged to multiply the frequency of each repeated receiver signal by4. In some embodiments, the receiver frequency multiplier 1095 maycomprise a plurality of individual frequency multipliers that arearranged in series. The output of the receiver frequency multiplier 1095may be provided to the mixer 860.

Signals outputted by transmitter frequency multiplier 1090 may beprovided to an array of transmitter antennas. Signals outputted byreceiver frequency multiplier 1095 may be provided to an array ofreceiver antennas.

In one example, a semiconductor device having local oscillatordistribution circuitry 1000 having three transmitters, four receivers,three transmitter repeaters 1070, and four receiver repeaters 1080consumes only 170 mW, which is far less than the over 1.6 W consumed bythe prior art circuitry referred to in the background.

FIG. 11 depicts a gain element 1022, in accordance with embodimentsherein. The depicted gain element 1022 comprises a first circuit 1100 a.The first circuit 1100 a comprises a capacitor 1110 a. The first circuit1100 a also comprises a resistor 1120 a, a first transistor 1130 a, anda second transistor 1140 a in parallel. One of the first transistor 1130a and the second transistor 1140 a is an NMOS transistor, and the otherof the first transistor 1130 a and the second transistor 1140 a is aPMOS transistor.

The gain element 1022 also comprises a second circuit 1100 b. The secondcircuit 1100 b comprises a capacitor 1110 b. The second circuit 1100 balso comprises a resistor 1120 b, a first transistor 1130 b, and asecond transistor 1140 b in parallel. One of the first transistor 1130 band the second transistor 1140 b is an NMOS transistor, and the other ofthe first transistor 1130 b and the second transistor 1140 b is a PMOStransistor.

In one embodiment, each first transistor 1130 a, 1130 b is the PMOStransistor of its circuit 1100 a, 1100 b and each second transistor 1140a, 1140 b is the NMOS transistor of its circuit 1100 a, 1100 b.

As depicted in FIG. 11, in the gain element 1022, the first circuit 1100a further comprises a first back gate voltage source 1135 a and a secondback gate voltage source 1145 a. The second circuit 1100 b furthercomprises a first back gate voltage source 1135 b and a second back gatevoltage source 1145 b. In other words, each first transistor 1130 a,1130 b is arranged to receive a first back gate voltage and each secondtransistor 1140 a, 1140 b is arranged to receive a second back gatevoltage.

In one embodiment, the first back gate voltage and the second back gatevoltage may be adjustable, either in tandem within one circuit 1100,independently from each other within one circuit 1100, in tandem acrossboth circuits 1100 a and 1100 b (i.e., for example, both the first backgate voltage source 1135 a and the second back gate voltage source 1135b may provide the same voltage to the back gates of first transistors1130 a and 1130 b), or completely independently (i.e., each of the fourtransistors 1130 a, 1130 b, 1140 a, and 1140 b may have its back gatevoltage adjusted independently of the back gate voltages of the otherthree transistors). By adjusting one or both of the first back gatevoltage and the second back gate voltage of one or both circuits 1100 aand 1100 b, the gain imparted by the gain element 1022 may be adjusted.This may allow convenient and/or energy-efficient adjustment of gain toa desired value before and/or during operation of a device comprisinggain element 1022.

In another embodiment, the first back gate voltage and the second backgate voltage may be fixed, either at the same value or at differentvalues. For example, in one embodiment, each NMOS transistor may bearranged to receive a back gate voltage of 0.8 V and each PMOStransistor may be arranged to receive a back gate voltage of 0 V.

Although FIG. 11 depicts a double ended gain element 1022, a singleended gain element having one circuit 1100 is also in accordance withembodiments herein.

The gain element 1022 may be operated with a number of parameters. Acurrent of about 2.5 mA may allow a differential voltage gain of 4 dBwhen the signal frequency input to the gain element 1022 is 20 GHz.Also, the gain may be adjusted by varying the supply voltage, the backgate voltage to the first transistors 1130 a, 1130 b, the back gatevoltage to the second transistors 1140 a, 1140 b, or two or morethereof. The first and second transistors 1130 a, 1130 b, 1140 a, and1140 b may be biased at any desirable level. For example, thetransistors may be biased close to peak cut-off frequency (fT). Thoughnot to be bound by theory, high frequency circuits generally requiretechnologies with higher fT for optimal function. It is desirable tobias the devices in mm-wave circuits at current densities to operate atpeak fT. In one embodiment, the first and second transistors 1130 a,1130 b, 1140 a, and 1140 b are biased at 200 μA/μm.

FIG. 12 depicts a splitter 1200. The splitter 1200 comprises a firstgain element 1210 in series with a plurality of second gain elements1220, wherein the plurality of second gain elements are in parallel.Although FIG. 12 depicts three second gain elements 1220 a, 1220 b, and1220 c, in embodiments herein, the splitter 1200 may comprise two, four,five, or another plural number of second gain elements 1220.

The first gain element 1210 may be as described above regarding gainelement 1022 depicted in FIG. 10. Each second gain element 1220 may alsobe as described above regarding gain element 1022 depicted in FIG. 10.For example, each first transistor of each circuit of each of the firstgain element and the plurality of the second gain elements may bearranged to receive first back gate voltages and the second transistorof each circuit of each of the first gain element and the plurality ofthe second gain elements may be arranged to receive second back gatevoltages. The back gate voltage of each transistor may be adjustedindependently or in tandem with any one or more other transistors' backgate voltages. For another example, each first transistor of eachcircuit of each gain element may be a PMOS transistor and each secondtransistor of each circuit of each gain element may be an NMOStransistor.

Although FIG. 12 depicts a single ended splitter 1200, this is forconvenience only. A double ended splitter wherein the first gain element1210 and each second gain element 1220 has two circuits 1100 a, 1100 bis also in accordance with embodiments herein.

Turning now to FIG. 13, a stylized depiction of a system 1300 forfabricating a semiconductor device package having a local oscillatordistribution circuitry 800, in accordance with embodiments herein, isillustrated. A system 1300 of FIG. 13 may comprise a semiconductordevice processing system 1310 and an integrated circuit design unit1340. The semiconductor device processing system 1310 may manufactureintegrated circuit devices based upon one or more designs provided bythe integrated circuit design unit 1340.

The semiconductor device processing system 1310 may comprise variousprocessing stations, such as etch process stations, photolithographyprocess stations, CMP process stations, etc. Each of the processingstations may comprise one or more processing tools 1314 and or metrologytools 1316. Feedback based on data from the metrology tools 1316 may beused to modify one or more process parameters used by the processingtools 1314 for performing process steps.

The semiconductor device processing system 1310 may also comprise aninterface 1312 that is capable of providing communications between theprocessing tools 1314, the metrology tools 1316, and a controller, suchas the processing controller 1320. One or more of the processing stepsperformed by the semiconductor device processing system 1310 may becontrolled by the processing controller 1320. The processing controller1320 may be a workstation computer, a desktop computer, a laptopcomputer, a tablet computer, or any other type of computing devicehaving one or more software products that are capable of controllingprocesses, receiving process feedback, receiving test results data,performing learning cycle adjustments, performing process adjustments,etc.

The semiconductor device processing system 1310 may produce integratedcircuits (e.g., semiconductor devices having local oscillatordistribution circuitry 800) on a medium, such as silicon wafers. Moreparticularly, in one embodiment, the semiconductor device processingsystem 1310 may produce a gain element, having: a first circuit having:a capacitor; a resistor in series with the capacitor; and a firsttransistor in series with a second transistor; wherein the firsttransistor and the second transistor are in parallel with the resistor,one of the first transistor and the second transistor is an NMOStransistor, and the other of the first transistor and the secondtransistor is a PMOS transistor; and a second circuit having: acapacitor; a resistor in series with the capacitor; and a firsttransistor in series with a second transistor; wherein the firsttransistor and the second transistor are in parallel with the resistor,one of the first transistor and the second transistor is an NMOStransistor, and the other of the first transistor and the secondtransistor is a PMOS transistor.

In another embodiment, the semiconductor device processing system 1310may produce a splitter, having: a first gain element in series with aplurality of second gain elements, wherein the plurality of second gainelements are in parallel; wherein the first gain element and each secondgain element each comprise: a first circuit having: a capacitor; aresistor in series with the capacitor; and a first transistor in serieswith a second transistor; wherein the first transistor and the secondtransistor are in parallel with the resistor, one of the firsttransistor and the second transistor is an NMOS transistor, and theother of the first transistor and the second transistor is a PMOStransistor; and a second circuit having: a capacitor; a resistor inseries with the capacitor; and a first transistor in series with asecond transistor; wherein the first transistor and the secondtransistor are in parallel with the resistor, one of the firsttransistor and the second transistor is an NMOS transistor, and theother of the first transistor and the second transistor is a PMOStransistor.

In yet another embodiment, the semiconductor device processing system1310 may produce a semiconductor device, having: an oscillator arrangedto provide a first signal having a wavelength λ; a first splitterarranged to receive the first signal and provide a second signal and athird signal, wherein the second signal and the third signal each havethe wavelength λ; a first line arranged to carry the second signalprovided by the first splitter; a second line arranged to carry thethird signal provided by the first splitter; a transmitter splitterarranged to receive the second signal via the first line and provide aplurality of transmitter signals, wherein each transmitter signal hasthe wavelength λ; and a receiver splitter arranged to receive the secondsignal via the second line and provide a plurality of receiver signals,wherein each receiver signal has the wavelength λ; wherein the firstline has a length from λ/4 to λ/32 and the second line has a length fromλ/4 to λ/32. The first splitter, the transmitter splitter, and thereceiver splitter may each be a splitter referred to above. Thesemiconductor device may also comprise one or more repeaters, whereineach repeater may be a gain element referred to above.

The production of integrated circuits by the semiconductor deviceprocessing system 1310 may be based upon the circuit designs provided bythe integrated circuit design unit 1340. The semiconductor deviceprocessing system 1310 may provide processed integrated circuits/devices1315 on a transport mechanism 1350, such as a conveyor system. In someembodiments, the conveyor system may be sophisticated clean roomtransport systems that are capable of transporting semiconductor wafers.In one embodiment, the semiconductor device processing system 1310 maycomprise a plurality of processing steps, e.g., the 1^(st) process step,the 2^(nd) process step, etc., as described above.

In some embodiments, the items labeled “1215” may represent individualwafers, and in other embodiments, the items 1315 may represent a groupof semiconductor wafers, e.g., a “lot” of semiconductor wafers. Theintegrated circuit or device 1315 may comprise a transistor, acapacitor, a resistor, a memory cell, a processor, and/or the like.

The integrated circuit design unit 1340 of the system 1300 is capable ofproviding a circuit design that may be manufactured by the semiconductordevice processing system 1310. This may include information regardingthe components of the local oscillator distribution circuitry 800described above.

The integrated circuit design unit 1340 may be capable of determiningthe number of devices (e.g., processors, memory devices, etc.) to placein a device package. Based upon such details of the devices, theintegrated circuit design unit 1340 may determine specifications of thedevices that are to be manufactured. Based upon these specifications,the integrated circuit design unit 1340 may provide data formanufacturing a semiconductor device package described herein.

The system 1300 may be capable of performing analysis and manufacturingof various products involving various technologies. For example, thesystem 1300 may receive design and production data for manufacturingdevices of CMOS technology, Flash technology, BiCMOS technology, powerdevices, memory devices (e.g., DRAM devices), NAND memory devices,and/or various other semiconductor technologies. This data may be usedby the system 1300 to fabricate semiconductor devices described herein.

The particular embodiments disclosed above are illustrative only, as theinvention may be modified and practiced in different but equivalentmanners apparent to those skilled in the art having the benefit of theteachings herein. For example, the process steps set forth above may beperformed in a different order. Furthermore, no limitations are intendedto the details of construction or design herein shown, other than asdescribed in the claims below. It is therefore evident that theparticular embodiments disclosed above may be altered or modified andall such variations are considered within the scope and spirit of theinvention. Accordingly, the protection sought herein is as set forth inthe claims below.

What is claimed is: 1-20. (canceled)
 21. A method, comprising:providing, to a transmitter splitter, a first signal having a wavelengthλ; providing, to a receiver splitter, a second signal having thewavelength λ; providing, by the transmitter splitter, a plurality oftransmitter signals, wherein each of the transmitter signals has thewavelength λ; and providing, by the receiver splitter, a plurality ofreceiver signals, wherein each of the receiver signals has thewavelength λ; wherein the first signal is provided over a first linehaving a length of λ/X, wherein X is an integer from 4 to 32, inclusive;the second signal is provided over a second line having a length of λ/Y,wherein Y is an integer from 4 to 32, inclusive; or both.
 22. The methodof claim 21, wherein: the length of the first line is from λ/8 to λ/16,and the length of the second line is from λ/8 to λ/16
 23. The method ofclaim 22, wherein: the length of the first line is about λ/10; and thelength of the second line is about λ/10.
 24. The method of claim 21,further comprising adjusting a gain of at least one of the first signalor the second signal, wherein adjusting the gain comprises adjusting aback gate voltage of at least one transistor of at least one of thetransmitter splitter and the receiver splitter.
 25. The method of claim21, further comprising: receiving, by a first splitter, an input signalhaving a wavelength λ, and splitting, by the first splitter, the inputsignal to provide the first signal and the second signal.
 26. The methodof claim 25, further comprising adjusting a gain of the input signal,wherein adjusting the gain comprises adjusting a back gate voltage of atleast one transistor of the first splitter.
 27. The method of claim 25,further comprising at least one of: providing, by an oscillator, theinput signal; or receiving, by a phase lock loop, a reference signal anda frequency modulated continuous wave (FMCW) signal, and providing, bythe phase lock loop, the input signal, wherein the input signal is phaselocked.
 28. The method of claim 21, further comprising: carrying, byeach of a plurality of third lines, one transmitter signal provided bythe transmitter splitter, wherein each third line has a length of λ/Z,wherein Z is an integer from 4 to 32, inclusive; carrying, by each of aplurality of fourth lines, one receiver signal provided by the receiversplitter, wherein each fourth line has a length of λ/W, wherein W is aninteger from 4 to 32, inclusive; repeating, by each of a plurality oftransmitter repeaters, the one transmitter signal carried by a one ofthe third lines; and repeating, by each of a plurality of receiverrepeaters, the one receiver signal carried by a one of the fourth lines.29. The method of claim 28, further comprising adjusting a gain of atleast one transmitter signal or at least one receiver signal, whereinadjusting the gain comprises adjusting a back gate voltage of at leastone transistor of at least one of the transmitter splitter, the receiversplitter, the transmitter repeaters, or the receiver repeaters.
 30. Themethod of claim 28, further comprising: carrying, by each of a pluralityof fifth lines, one transmitter signal provided by one of the pluralityof transmitter repeaters, wherein each fifth line has a length of λ/V,wherein V is an integer from 4 to 32, inclusive; carrying, by each of aplurality of sixth lines, one receiver signal provided by one of theplurality of receiver repeaters, wherein each sixth line has a length ofλ/U, wherein U is an integer from 4 to 32, inclusive; multiplying, by atransmitter frequency multiplier, a frequency of each of the transmittersignals carried by the plurality of fifth lines; and multiplying, by areceiver frequency multiplier, a frequency of each of the receiversignals carried by the plurality of sixth lines; wherein each of thefifth lines has a length from λ/4 to λ/32 and each of the sixth lineshas a length from λ/4 to λ/32.
 31. The method of claim 30, whereinmultiplying, by the transmitter frequency multiplier, is by 2, 3, 4, or5, and multiplying, by the receiver frequency multiplier, is by 2, 3, 4,or
 5. 32. The method of claim 21, wherein providing, by the transmittersplitter, comprises providing three transmitter signals, and providing,by the receiver splitter, comprises providing four receiver signals. 33.A method, comprising: providing, by a phase lock loop, a firstmillimeter-wave (mm-wave) signal having a wavelength, λ; receiving, by afirst splitter, the first signal; providing, by the first splitter, afirst transmit signal on a first transmit line, and a first receivesignal on a first receive line, wherein the first transmit signal andthe first receive signal each have the wavelength λ; receiving, by atransmitter splitter, the first transmit signal; providing, by thetransmitter splitter, a second transmit signal on a second transmit lineand a third transmit signal on a third transmit line, wherein the secondand third transmit signals each have the wavelength λ; and receiving, bya receiver splitter, the first receive signal; and providing, by thereceiver splitter, a second receive signal on a second receive line anda third receive signal on a third receive line, wherein the second andthird receive signals each have the wavelength λ; wherein at least oneof the following conditions is true: the first transmit line has alength of λ/X, wherein X is an integer from 4 to 32, inclusive; thefirst receive line has a length of λ/Y, wherein Y is an integer from 4to 32, inclusive; the second transmit line has a length of λ/Z, whereinZ is an integer from 4 to 32, inclusive; the third transmit line has alength of λ/W, wherein W is an integer from 4 to 32, inclusive; thesecond receive line has a length of λ/V, wherein V is an integer from 4to 32, inclusive; or the third receive line has a length of λ/U, whereinU is an integer from 4 to 32, inclusive.
 34. The method of claim 33,further comprising adjusting a gain of at least one signal, whereinadjusting the gain comprises adjusting a back gate voltage of at leastone transistor of at least one of the first splitter, the transmittersplitter, and the receiver splitter.
 35. A method, comprising: adjustinga gain of a splitter comprising (I) at least one gain element, the gainelement comprising: (A) a first circuit comprising (i) a capacitor; and(ii) a resistor, a first transistor, and a second transistor inparallel; wherein one of the first transistor and the second transistoris an NMOS transistor, and the other of the first transistor and thesecond transistor is a PMOS transistor; and (B) a second circuitcomprising (i) a capacitor; and (ii) a resistor, a third transistor, anda fourth transistor in parallel; wherein one of the third transistor andthe fourth transistor is an NMOS transistor, and the other of the thirdtransistor and the fourth transistor is a PMOS transistor; whereinadjusting the gain comprises adjusting a first back gate voltage of atleast one of the first transistor and the third transistor; adjusting asecond back gate voltage of at least one of the second transistor andthe fourth transistor; or both.